Simulation and Derivation of Deflection Equation for Suspended Diaphragm for MEMS Application Using Kirchhoff-Love Theory

In this paper, using theory of sheets, the deflection of suspended diaphragm has been obtained under uniform and circular loading. This type of diaphragm, unlike other diaphragms, has a central support which is recommended to be used in MEMS applications. The relationship between diaphragm deflection and static analysis of this diaphragm enjoys a great significance in investigating and understanding its behavior and calculating its other practical parameters both in dynamic and static fields. Here, using the thin sheet Kirchhoff-Law theory these issues are addressed. The results of analysis and simulation have been compared with each other, representing the 1% accuracy of the obtained statements, suggesting accuracy of the obtained results. The results show that the suspended diaphragm has greater deflection compared to simple flat diaphragm, which is considered important in sensors and micro electromechanical devices.